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Charged-particle-beam-projection-microlithography transfer metho

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Chemical gas analysis during processing of chemically amplified

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Color correction method for color negative

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Color image recording system and method to prevent color displac

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Color image reproduction of scenes with preferential tone mappin

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Compensating for effects of topography variation by using a...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Compensation of flare-induced CD changes EUVL

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Compensation of reflective mask effects in lithography systems

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Compensation of within-subfield linewidth variation in...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Computer program product for calculating a process tolerance...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Conducting electron beam resist thin film layer for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Conductive photoresist pattern for long term calibration of...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Constant current multi-beam patterning

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Constructing tone scale curves

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Contact hole model-based optical proximity correction method

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Control method for exposure apparatus and control method for...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Control of critical dimensions through measurement of absorbed r

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Control system and methods for photolithographic processes

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Controlling method of forming thin film, system for said control

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Controlling system and method for operating the same

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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