Controlling system and method for operating the same

Details Controlling system and method for operating the same Controlling system and method for operating the same

2005-12-28

2009-12-15

Young, Christopher G (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S313000, C430S330000, C250S492300, C356S451000, C356S496000, C356S511000, C356S636000, C382S145000, C382S149000

Reexamination Certificate

active

07632616

ABSTRACT:
The invention is directed to a method for controlling a critical dimension of a patterned photoresist layer. The method comprises steps of measuring a critical dimension of a raised pattern in a patterned photoresist layer after a photolithography process is performed on the photoresist layer. A determining process is performed to determine whether the critical dimension is within a critical dimension control limit range, wherein the critical dimension control limit range has a upper control limit and a lower control limit. An adjusting process is performed when the critical dimension is not within the critical dimension control limit range. When the critical dimension is smaller than the lower control limit, a photoresist reflow process is performed. When the critical dimension is larger than the upper control limit a photoresist trimming process is performed.

REFERENCES:
patent: 7405032 (2008-07-01), Amblard et al.
patent: 2004/0038139 (2004-02-01), Mui et al.

Affiliated with

Also associated with

Rating

Controlling system and method for operating the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Controlling system and method for operating the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Controlling system and method for operating the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4077059