Method of aligning electron beam apparatus

Method of aligning two members utilizing marks provided thereon

Method of checking an isocentre and a patient-positioning...

Method of detecting a marker provided on a specimen

Method of detecting positional displacement between mask and waf

Method of determining processing position in charged...

Method of electron beam exposure

Method of electron-beam exposure and mask and electron-beam...

Method of manufacturing semiconductor device using measurement m

Method of providing changed particle beam exposure in which repr

Method of shadow printing exposure

Method of using an electron beam

Method of using an electron beam

Methods and devices for calibrating a charged-particle-beam...

Methods for detecting incidence orthogonality of a patterned...

Multichannel linear induction accelerator of charged particles

Optical alignment apparatus for teletherapy machine or the like

Optical alignment sensor

Optical beam pointing system for setting irradiation...

Optical pointer for radiographic apparatus