Radiant energy – Means to align or position an object relative to a source or...
Patent
1990-02-26
1990-12-11
Berman, Jack I.
Radiant energy
Means to align or position an object relative to a source or...
250307, G01N 23225
Patent
active
049773283
ABSTRACT:
In a method of detecting a marker by means of an electron beam system, the detection time can be minimized for predetermined accuracy specifications by making a choice between a correlation search method and a level search method, which choice is co-determined by marker properties. The use of a correction value for calculating the correlation values reduces the risk of incorrect marker identification.
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Berman Jack I.
Miller Paul R.
Nguyen Kiet T.
U.S. Philips Corporation
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