Method of providing changed particle beam exposure in which repr

Details Method of providing changed particle beam exposure in which repr Method of providing changed particle beam exposure in which repr

1997-11-04

1999-10-12

Anderson, Bruce

Radiant energy

Means to align or position an object relative to a source or...

H01J 37302

Patent

active

059658959

ABSTRACT:
A method for providing charged particle beam exposure onto an object having a plurality of chip areas with a plurality of aligning marks formed in correspondence to each of said chip areas. A charged particle beam is irradiated upon an object mounted on a mobile step based upon positions of the aligning marks. Actual positions of the alignment marks are detected and compared to the design positions of the alignment marks to determine approximate relationships which are used to calculate an actual position to perform exposure.

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