Method of determining processing position in charged...

Details Method of determining processing position in charged... Method of determining processing position in charged...

2005-11-23

2008-12-02

Berman, Jack I (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492200, C250S492210, C250S307000, C250S310000, C250S338400, C250S338100, C250S339110, C250S339080, C250S341800, C250S343000, C250S346000, C430S313000, C430S315000, C438S401000, C438S462000, C438S692000, C438S016000, C438S694000, C356S365000

Reexamination Certificate

active

07459699

ABSTRACT:
A laser mark which will be the positioning mark for a secondary charged particle image in the charged particle beam apparatus is applied by moving the sample processing/observation area in the charged particle beam apparatus so as to come into the view field while performing an observation by an infrared microscope, and by a using a laser optical system disposed coaxially with an optical observation system, the mark made at the periphery of the processing/observation object area. Next, by a superposition of an infrared transmission image and a CAD data, the processing/observation object area and the laser mark are registered onto the CAD data. And, by a correlation of the registered data read from the charged particle beam apparatus and the secondary charged particle image, it is possible to accurately and easily determine the processing position.

REFERENCES:
patent: 5843831 (1998-12-01), Chung et al.
patent: 5985764 (1999-11-01), Lin et al.
patent: 6639226 (2003-10-01), Morio et al.
patent: H11-144670 (1999-05-01), None
patent: H11-329315 (1999-11-01), None

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