Gas supply unit, gas supply method and exposure system

Details Gas supply unit, gas supply method and exposure system Gas supply unit, gas supply method and exposure system

2006-01-17

2006-01-17

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C356S437000

Reexamination Certificate

active

06987276

ABSTRACT:
A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.

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