Gas supply unit, gas supply method and exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices

Reexamination Certificate

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C356S437000

Reexamination Certificate

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06987276

ABSTRACT:
A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.

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