Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2006-01-17
2006-01-17
Lee, John R. (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S492220, C355S030000, C355S053000, C355S055000
Reexamination Certificate
active
06987278
ABSTRACT:
In a lithographic apparatus using exposure radiation of a relatively short wavelength, e.g. 157 or 126 nm, a laminar flow of N2is provided across parts of the beam path in or adjacent to moving components of the apparatus. The laminar flow is faster than the maximum speed of the moving components and the diffusion rate of air thereby minimizing the contamination of the N2by mixing with air. Laminar flow may be ensured by providing partitions to divide the beam path into separate spaces, by covering rough or non-planar surfaces in components on or adjacent to the laminar flow and by providing aerodynamic members.
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ASML Netherlands B.V.
Fernandez Kalimah
Lee John R.
Pillsbury & Winthrop LLP
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