Gas-shield electron-beam gun for thin-film curing application

Details Gas-shield electron-beam gun for thin-film curing application Gas-shield electron-beam gun for thin-film curing application

2006-03-14

2006-03-14

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492200, C315S111810

Reexamination Certificate

active

07012268

ABSTRACT:
An electron-beam irradiation apparatus includes an evacuatable filament-electron gun chamber housing a filament and an anode and having an inactive-gas inlet through which an inactive gas flows in; an evacuatable treatment chamber connected to an exhaust system; and a separation wall for separating the filament-electrode gun chamber and the treatment chamber. The separation wall has an aperture configured to pass electrons and gas therethrough from the filament-electron gun chamber.

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