Gas shower, lithographic apparatus and use of a gas shower

Details Gas shower, lithographic apparatus and use of a gas shower Gas shower, lithographic apparatus and use of a gas shower

2005-10-21

2008-10-07

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S428000, C250S43200R, C250S435000, C250S438000

Reexamination Certificate

active

07432513

ABSTRACT:
A gas shower to condition at least one optical path in an optical apparatus, wherein the gas shower includes a gas distribution chamber having a shower outlet side to supply gas to the optical path, the gas distribution chamber being configured to distribute the gas to the optical path, wherein the gas distribution chamber includes a substantially sharp tapered tip.

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