Variable shaped electron beam exposure system and method of...

Variable transmission reticle for charged particle beam...

Variable-axis stigmator lens and charged-particle-beam microlith

Variable-spot scanning in an electron beam exposure system

Variable-spot scanning in an electron beam exposure system

Variably shaped beam EB writing system

Variably shaped beam EB writing system

Variably shaped beam EB writing system

Versatile, high-sensitivity faraday cup array for ion...

Virtual addressing for E-beam lithography

VUV lithography

Wafer 2D scan mechanism

Wafer charge compensation device and ion implantation system...

Wafer clamping apparatus and method

Wafer holding apparatus for ion implanting system

Wafer holding pin

Wafer holding pin

Wafer pedestal tilt mechanism

Wafer scanning support unit of ion implantation apparatus

Wafer transport apparatus for ion implantation apparatus