Radioactive electron emitting microchannel plate
Radiographic apparatus
Rapid pumpdown for high vacuum processing
Raster frame beam system for electron beam lithography
Raster frame beam system for electron beam lithography
Raster shaped beam, electron beam exposure strategy using a...
Rasterization system for converting polygonal pattern data into
Real time monitor method and system for extraction electrode
Real time monitoring simultaneous imaging and exposure in...
Real time non-destructive dose monitor
Real-time prediction of and correction of proximity resist...
Real-time prediction of proximity resist heating and...
Reduced path ion beam implanter
Reducing the critical dimension difference of features...
Redundant printing in e-beam lithography
Reflective electron patterning device and method of using same
Reflective optical systems for EUV lithography
Reflector for generating a neutral beam and substrate...
Removable liners for charged particle beam systems
Removable liners for charged particle beam systems