Reflector for generating a neutral beam and substrate...

Details Reflector for generating a neutral beam and substrate... Reflector for generating a neutral beam and substrate...

2006-01-30

2008-11-04

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S251000

Reexamination Certificate

active

07446325

ABSTRACT:
Example embodiments of the present invention provide a reflector for generating a neutral beam and a substrate processing apparatus including the same. The reflector may include at least one reflecting plate including a reflecting layer onto which an ion beam collides and a supporting layer. The reflecting layer may reflect and convert the ion beam into a neutral beam, and the supporting layer may reduce thermal deformation of the reflecting layer.

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Korean Office Action dated Aug. 25, 2006.

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