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High-energy ion implanter and method of operation thereof

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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High-energy ion implanter for fabricating a semiconductor...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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High-temperature ion implantation apparatus and methods of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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High-temperature ion implantation apparatus and methods of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Holder assembly system and method in an emitted energy...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Holder assembly system and method in an emitted energy...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hollow-beam apertures for charged-particle-beam...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hybrid focused-flood ion beam system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hybrid magnetic/electrostatic deflector for ion implantation...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hybrid moving stage and rastered electron beam lithography syste

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hybrid scanning system and methods for ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Hydrogen ion implanter using a broad beam source

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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