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Focused ion beam implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Focused ion beam mask maker

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Focused ion beam metrology

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Focused ion beam processing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Focused ion beam processing method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Focused ion beam processing system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Focused ion beam processing with charge control

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Frame-supported pellicle for dustproof protection of photomask

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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