Forming a semiconductor device feature using acquired...

Gantry with an ion-optical system

Gantry, particle therapy system, and method for operating a...

Gas flushing system for use in lithographic apparatus

Gas flushing system for use in lithographic apparatus

Gas flushing system with recovery system for use in...

Gas-shield electron-beam gun for thin-film curing application

Generator for pulsed electron beams

Hydronic cooling of particle accelerator window

Implantation of the radioactive 32P atoms

Impurity introducing apparatus and impurity introducing method

Industrial material processing electron linear accelerator

Inerting chamber for electron curing of resin coated webs

Information acquisition apparatus, cross section evaluating...

Installation and method for sterilising objects by...

Installation for sterilizing articles by electron bombardment

Integrated system for frontside navigation and access of...

Intraoperative electron beam therapy system and facility

Intraoperative electron beam therapy system and facility

Ion acceleration system for hadrontherapy