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Deflection lens device for electron beam lithography

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Device and method for electron beam irradiation

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Device and method for locally resolved control of a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Device and method for milling of material using ions

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Device fabrication methods using charged-particle-beam...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Device for irradiating a target with a hadron-charged beam,...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Device for irradiating a tumor tissue

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Device for irradiating tumour tissue in a patient with a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Device for removing the gaseous laminar boundary layer of a web

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Device for shielding of x-rays in electron bombardment of materi

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Device for the irradiation of a product on both faces

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Device to irradiate surfaces with electrons

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Dual beam system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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