Deflection lens device for electron beam lithography
Device and method for electron beam irradiation
Device and method for locally resolved control of a...
Device and method for milling of material using ions
Device fabrication methods using charged-particle-beam...
Device for irradiating a target with a hadron-charged beam,...
Device for irradiating a tumor tissue
Device for irradiating tumour tissue in a patient with a...
Device for removing the gaseous laminar boundary layer of a web
Device for shielding of x-rays in electron bombardment of materi
Device for the irradiation of a product on both faces
Device to irradiate surfaces with electrons
Dual beam system