4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation
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Uniform cross section ion beam system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Uniformity correction for large area electron source

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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