4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation
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Gantry with an ion-optical system

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gantry, particle therapy system, and method for operating a...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gas flushing system for use in lithographic apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gas flushing system with recovery system for use in...

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Gas-shield electron-beam gun for thin-film curing application

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Generator for pulsed electron beams

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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