Ion beam means

Details Ion beam means Ion beam means

1977-11-17

1979-07-31

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

250396R, 250398, 250309, C01M 2300, H01J 2700

Patent

active

041631536

ABSTRACT:
An ion beam apparatus applies an ion beam emitted from a gaseous ion source to a solid material which constitutes a solid ion source. Ions of the solid material are emitted from the solid material as a result of the application of the exciting ion beam and are extracted by an extracting electrode and applied to a specimen.

REFERENCES:
patent: 3508045 (1970-04-01), Andersen et al.
patent: 3742227 (1973-06-01), Benninghaven
patent: 3973121 (1976-08-01), Fite et al.

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