Ion beam generator

Radiant energy – Ion generation – Field ionization type

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Details

250423R, 250423F, H01J 3708, H01J 2724

Patent

active

046926275

ABSTRACT:
An ion beam generator includes: an ion generating section for generating ions and where the material to be ionized is introduced; a gas discharge device for exciting the material to be ionized to a low excited state; a light source for introducing a light into the ion generating section, which light has a wavelength such that it excites the material to be ionized to an intermediate state from the low excited state of the material by a resonance excitation; and the specific material to be taken out as an ion beam being selectively ionized through the intermediate state.

REFERENCES:
patent: 3987302 (1976-10-01), Hurst et al.
patent: 4107537 (1978-08-01), Forsen et al.
patent: 4148612 (1979-04-01), Taylor et al.
patent: 4166219 (1979-08-01), Ausschnitt et al.
patent: 4297191 (1981-10-01), Chen
patent: 4536657 (1985-08-01), Bruel

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