Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2006-08-01
2006-08-01
Vo, Tuyet Thi (Department: 2821)
Radiant energy
Ion generation
Field ionization type
C250S42300F, C315S111810, C315S111210
Reexamination Certificate
active
07084407
ABSTRACT:
An extractor system for a plasma ion source has a single (first) electrode with one or more apertures, or a pair of spaced electrodes, a first or plasma forming electrode and a second or extraction electrode, with one or more aligned apertures. The aperture(s) in the first electrode (or the second electrode or both) have a counterbore on the downstream side (i.e. away from the plasma ion source or facing the second electrode). The counterbored extraction system reduces aberrations and improves focusing. The invention also includes an ion source with the counterbored extraction system, and a method of improving focusing in an extraction system by providing a counterbore.
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Ji Qing
King Tsu-Jae
Leung Ka-Ngo
Standiford Keith
Milner Joseph R.
The Regents of the University of California
Vo Tuyet Thi
Yeung Adrienne
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