Converged ion beam apparatus

Details Converged ion beam apparatus Converged ion beam apparatus

1990-05-17

1991-11-05

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250397, 2505051, 2504922, G01W 2300

Patent

active

050632949

ABSTRACT:
A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

REFERENCES:
patent: 3585397 (1971-06-01), Brewer
patent: 3909305 (1975-09-01), Boroffka et al.
patent: 4053808 (1977-10-01), Peacock
patent: 4550258 (1985-10-01), Omata et al.
patent: 4697086 (1987-09-01), Ishitomi et al.
patent: 4755685 (1988-07-01), Kawanami et al.
patent: 4894549 (1990-01-01), Stengl
patent: 4954705 (1990-09-01), Brummer et al.

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