Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2011-03-08

2011-03-08

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S310000, C250S311000, C250S492210

Reexamination Certificate

active

07902505

ABSTRACT:
When a sample includes repeated cells, a scale pattern corresponding to the repeated cells is generated. Next, the scale pattern generated is superimposed on the image of the repeated cells of the sample, thereby identifying a destination cell. Moreover, disposition of the repeated cells of the sample is determined based on positions of at least three ends of the repeated cells. Then, the position of the destination cell is identified from this disposition of the repeated cells. Furthermore, a zoom image is generated by a combination of a zoom based on beam deflection function and a zoom based on software. Then, the image shift is performed by software without displacing a sample stage.

REFERENCES:
patent: 5401972 (1995-03-01), Talbot et al.
patent: 5402410 (1995-03-01), Yoshimura et al.
patent: 2004/0129879 (2004-07-01), Furiki et al.
patent: 2006/0171593 (2006-08-01), Hayakawa et al.
patent: 62-014427 (1987-01-01), None
patent: 2000-031233 (2000-01-01), None
patent: 2004-170395 (2004-06-01), None
Japanese Office Action, with English partial translation, issued in Japanese Patent Application No. 2005-284733, mailed Apr. 27, 2010.

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