Charged particle detection apparatus and detection method

Details Charged particle detection apparatus and detection method Charged particle detection apparatus and detection method

2011-05-24

2011-05-24

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S311000

Reexamination Certificate

active

07947953

ABSTRACT:
A detection apparatus for use in a charged particle beam device is provided. The detection apparatus includes a separation field generating portion adapted to generate a separation field separating positively and negatively charged secondary particles, at least one first detector for detecting positively charged particles, at least one second detector for detecting negatively charged particles, wherein the detection apparatus is adapted to simultaneously detect the positively charged secondary particles in the at least one first detector and the negatively charged secondary particles in the at least one second detector. Further, a method of simultaneously detecting negatively and positively charged particles is provided. The method includes providing a separation field, providing at least one first detector and at least one second detector, separating the negatively charged particles from the positively charged particles in the separation field, simultaneously detecting positively charged particles with the at least one first detector and negatively charged particles with the at least one second detector.

REFERENCES:
patent: 4841143 (1989-06-01), Tamura et al.
patent: 4902967 (1990-02-01), Flesner
patent: 6396299 (2002-05-01), Hayashida
patent: 2002/0170675 (2002-11-01), Libby et al.
patent: 2003/0213893 (2003-11-01), Ichirota et al.
patent: 2004/0124356 (2004-07-01), Scholtz et al.
patent: 0985141 (2000-03-01), None
patent: 01 292736 (1989-11-01), None
patent: 06096712 (1994-04-01), None
patent: 09264858 (1997-10-01), None
patent: 2002117798 (2002-04-01), None
International Search Report. Sep. 8, 2007.
International Search Report. Nov. 27, 2008.
European Search Report and Written Opinion dated Mar. 27, 2009, European Application No. 08166151.4.

Affiliated with

Also associated with

Rating

Charged particle detection apparatus and detection method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle detection apparatus and detection method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle detection apparatus and detection method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2681253