Composite apparatus with secondary ion mass spectrometry instrum

Details Composite apparatus with secondary ion mass spectrometry instrum Composite apparatus with secondary ion mass spectrometry instrum

1989-09-20

1991-04-16

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250285, 250397, 250423R, H01J 3726

Patent

active

050085379

ABSTRACT:
A composite apparatus is disclosed which includes in combination a secondary ion mass spectrometry instrument and a scanning electron microscope. A liquid metal ion source and an ion source other than the liquid metal ion source are installed in the same apparatus so that an ion beam emitted from the liquid metal ion source and an ion beam emitted from the ion source other than the liquid metal ion source are aligned with each other on a primary beam axis which is an optical axis of an irradiating system. The liquid metal ion source is disposed in rear of a primary ion separating device which mass-separates the ion beam emitted from the ion source other than the liquid metal ion source. Further, an electron gun is installed in the same apparatus so that an electron beam emitted from the electron gun is aligned with the ion beam on the primary beam axis.

REFERENCES:
patent: 3831026 (1974-08-01), Powers
patent: 4564758 (1986-01-01), Slodgian et al.
patent: 4740698 (1988-04-01), Tomura et al.
patent: 4818872 (1989-04-01), Parker et al.
patent: 4835399 (1989-05-01), Hosaka et al.

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