Gas blowing nozzle of charged particle beam apparatus and...

Details Gas blowing nozzle of charged particle beam apparatus and... Gas blowing nozzle of charged particle beam apparatus and...

2007-06-26

2007-06-26

Vanore, David (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S492300

Reexamination Certificate

active

11048962

ABSTRACT:
There are provided a gas blowing nozzle adapted such that, by the fact that a groove-like notch structure has been provided in a side to which a beam IB comes flying in a nozzle tip part of a gas gun used on the occasion of a beam assist deposition or a beam assist etching, the beam IB can pass through an inside of the notch structure, and a charged particle beam apparatus having the gas blowing nozzle11as well as a working method.

REFERENCES:
patent: 6555815 (2003-04-01), Feuerbaum et al.

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