Devices and methods for sensing secure attachment of an...
Differential interferometer system and lithographic step-and-sca
Displacement correction apparatus, exposure system, exposure...
Distance and tilt sensing apparatus
Divided sub-image array scanning and exposing system
Double-sided patterning system using dual-wavelength output of a
Driving apparatus and exposure apparatus
Driving apparatus, exposure apparatus, and device...
Dual phase grating alignment marks
Dual stage lithographic apparatus and device manufacturing...
DUV scanner linewidth control by mask error factor compensation
Dynamic fluid control system for immersion lithography
Dynamic fluid control system for immersion lithography