Displacement correction apparatus, exposure system, exposure...

Details Displacement correction apparatus, exposure system, exposure... Displacement correction apparatus, exposure system, exposure...

2006-05-16

2006-05-16

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C355S055000

Reexamination Certificate

active

07046334

ABSTRACT:
An exposure system includes, (a) an exposure apparatus, and (b) a displacement correction apparatus having a curvature information storage unit configured to store curvature information of a reticle; a displacement information calculation unit configured to calculate displacement generated in the reticle being fixed on a reticle stage of an exposure apparatus based on the curvature information; and a correction information calculation unit configured to calculate correction information for correcting a projection lens of the exposure apparatus based on the displacement.

REFERENCES:
patent: 6169602 (2001-01-01), Taniguchi et al.
patent: 6549271 (2003-04-01), Yasuda et al.
patent: 2002/0192598 (2002-12-01), Hirayanagi
patent: 2003/0016338 (2003-01-01), Yasuda et al.
patent: 2003/0090640 (2003-05-01), Fujisawa et al.
patent: 2003/0117599 (2003-06-01), Takakuwa et al.
patent: 2004/0100624 (2004-05-01), Hagiwara et al.

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