Driving apparatus, exposure apparatus, and device...

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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Details

C355S072000, C310S010000, C310S012060, C318S611000, C318S623000, C318S625000

Reexamination Certificate

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06891597

ABSTRACT:
A driving apparatus which drives an object along a guide surface in X and Y directions. The apparatus includes a first actuator which drives the object in the X direction, a second actuator which drives the object in the Y direction, and a controller which controls the first and second actuators. The first and second actuators each have a reaction force counter which moves upon receipt of a reaction force generated in driving the object. In moving the object standing at a first position to a second position and stopping the object, the controller controls the first and second actuators such that acceleration periods of the two coincide and deceleration periods of the two coincide. Also, the object moves on a straight line connecting the first position and the second position.

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