Dual stage lithographic apparatus and device manufacturing...

Details Dual stage lithographic apparatus and device manufacturing... Dual stage lithographic apparatus and device manufacturing...

2007-01-09

2007-01-09

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000, C355S072000

Reexamination Certificate

active

11135655

ABSTRACT:
The invention relates to a dual stage lithographic apparatus, wherein two substrate stages are constructed and arranged for mutual cooperation in order to perform a joint scan movement. The joint scan movement brings the lithographic apparatus from a first configuration, wherein immersion liquid is confined between a first substrate held by the first stage of the stages and a projection system of the apparatus, to a second configuration, wherein the immersion liquid is confined between a second substrate held by the second stage of the two stages and the projection system, such that during the joint scan movement the liquid is essentially confined within the space with respect to the projection system.

REFERENCES:
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6341007 (2002-01-01), Nishi et al.
patent: 2005/0237510 (2005-10-01), Shibazaki
patent: 2006/0061747 (2006-03-01), Ishii
patent: 1 486 827 (2004-12-01), None
patent: 1 486 827 (2005-03-01), None
patent: WO2004/114380 (2004-12-01), None

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