Divided sub-image array scanning and exposing system

Details Divided sub-image array scanning and exposing system Divided sub-image array scanning and exposing system

2011-04-26

2011-04-26

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C349S029000

Reexamination Certificate

active

07932993

ABSTRACT:
An “image writing” and “image reading” system and method for providing a pattern to a subject such as a wafer is provided or an image to an image sensor such as CCD. The system includes a pixel panel, such as a digital mirror device or a liquid crystal display or other SLM, for generating for creating a plurality of sub-image array of the pattern in “image writing” case. The pixel elements are simultaneously divided to a sub-image array on the subject by a lens system. The system also includes a stage for moving, stepping or scanning the pixel panel, relative to the subject so that it can create a contiguous whole image on the subject.

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