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Particle detecting method and system for detecting minute partic

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Patent

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Particle detecting system

Optics: measuring and testing – Refraction testing – Prism engaging specimen

Patent

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Particle detecting system and method of detecting particles...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material

Reexamination Certificate

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Particle detection and embedded vision system to enhance...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Particle detection and removal apparatus for use on wafer...

Optics: measuring and testing – By particle light scattering

Reexamination Certificate

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Particle detection apparatus and particle detection method...

Optics: measuring and testing – By particle light scattering

Reexamination Certificate

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Particle detection beam

Optics: measuring and testing – By particle light scattering – With photocell detection

Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material

Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material

Reexamination Certificate

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Particle detection device, lithographic apparatus and device...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Particle detection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Particle detection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Particle detection method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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