Particle detection method and apparatus

Details Particle detection method and apparatus Particle detection method and apparatus

1986-10-23

1988-09-20

Wan, Gene

Optics: measuring and testing

For size of particles

By particle light scattering

356337, G01N 1502

Patent

active

047721260

ABSTRACT:
An apparatus and method are disclosed for detecting the presence of particles on the surface of an object such as the front side of a patterned semiconductor wafer. A vertically expanded, horizontally scanning, beam of light is directed onto an area on the surface of the object at a grazing angle of incidence. A video camera positioned above the surface detects light scattered from any particles which may be present on the surface, but not specularly reflected light. The surface is angularly prepositioned (rotated) relative to the incident light beam so that the diffracted light from the surface and the pattern of lines on the surface is at a minimum. The object is then moved translationally to expose another area to the incident light beam so that the entire surface of the object or selected portions thereof can be examined, an area at a time.

REFERENCES:
patent: 4377340 (1983-03-01), Green et al.

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