Optics: measuring and testing – Inspection of flaws or impurities – Transparent or translucent material
Reexamination Certificate
2007-08-14
2007-08-14
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Transparent or translucent material
Reexamination Certificate
active
11138680
ABSTRACT:
There is provided a particle detector system and to detect particles on target including reticle and pellicle. The system includes a light transmitting device adapted to transmit light beam to a target through an electrowetting microlens, a light receiving device adapted to receive the transmitted light beam reflected by a surface of the target, a light refraction angle adjusting controller adapted to apply a voltage to the electrowetting microlens in order to adjust an incident angle of the light irradiated, and a detector adapted to analyze the light received by the light receiving device to determine whether there are particles on a surface of the target.
REFERENCES:
patent: 4966457 (1990-10-01), Hayano et al.
patent: 4999510 (1991-03-01), Hayano et al.
patent: 5072128 (1991-12-01), Hayano et al.
patent: 5363187 (1994-11-01), Hagiwara et al.
patent: 5381225 (1995-01-01), Kohno
patent: 5410400 (1995-04-01), Shishido et al.
patent: 5436464 (1995-07-01), Hayano et al.
patent: 5539514 (1996-07-01), Shishido et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5574598 (1996-11-01), Koumura et al.
patent: 5862054 (1999-01-01), Li
patent: 6369954 (2002-04-01), Berge et al.
patent: 6459491 (2002-10-01), Nguyen
patent: 6545815 (2003-04-01), Kroupenkine et al.
patent: 6545816 (2003-04-01), Kroupenkine et al.
patent: 6636301 (2003-10-01), Kvamme et al.
patent: 7046447 (2006-05-01), Raber
patent: 2001/0017985 (2001-08-01), Tsuboi et al.
patent: 2003/0011786 (2003-01-01), Levy et al.
patent: 2003/0060916 (2003-03-01), Hsieh
patent: 2004/0227063 (2004-11-01), Viinikanoja
patent: 2006/0262433 (2006-11-01), Hendriks et al.
Berge et al., “Variable focal lens controlled by an external voltage: An application of electrowetting”, Eur. Phys. J. E 3, 159-163 (2000).
Krupenkin et al., “Tunable liquid microlens”, Applied Physics Letters, vol. 82, No. 3, pp. 316-318, (Jan. 20, 2003).
Cartoon Daniel
Chowdhury Tarifur
Samsung Electronics Co,. Ltd
Volentine & Whitt PLLC
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