Particle detection device, lithographic apparatus and device...

Details Particle detection device, lithographic apparatus and device... Particle detection device, lithographic apparatus and device...

2008-03-25

2008-03-25

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Transparent or translucent material

C356S239200

Reexamination Certificate

active

10957752

ABSTRACT:
To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.

REFERENCES:
patent: 5225886 (1993-07-01), Koizumi et al.
patent: 5745236 (1998-04-01), Haga
patent: 6222624 (2001-04-01), Yonezawa
patent: 2003/0048439 (2003-03-01), Yoshida et al.
Office Action in U.S. Appl. No. 11/242,146, filed Oct. 2, 2006.
Notice of Allowability in U.S. Appl. No. 11/242,146, filed May 24, 2007.

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