Particle detection method and apparatus

Details Particle detection method and apparatus Particle detection method and apparatus

1988-09-19

1990-01-23

Mottola, Steven

Optics: measuring and testing

For size of particles

By particle light scattering

356337, G01N 1502

Patent

active

048954462

ABSTRACT:
An apparatus and method are disclosed for detecting the presence of particles on the surface of an object such as the front side of a patterned semiconductor wafer. A collimated beam of light is directed onto an area on the surface of the object at a grazing angle of incidence. A detector positioned above the surface detects light scattered from any particles which may be present on the surface, but not specularly reflected light. The output of the detector is fed into a computer where the information is processed and then displayed on a display. The surface is prepositioned relative to the incident light beam so that the diffracted light from the surface and the pattern on the surface is at a minimum. The object is then moved translationally to expose another area to the incident light beam so that the entire surface of the object or selected portions thereof can be examined, an area at a time.

REFERENCES:
patent: 4377340 (1983-03-01), Green et al.
patent: 4772126 (1988-09-01), Allemand et al.

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