Apparatus and method for measuring displacement, surface...

Auto focus system for reticle inspection

Confocal displacement sensor

Confocal microscope and height measurement method using the...

Displacement sensor

Height measuring apparatus and method and testing apparatus...

Imaging a three-dimensional structure by confocal focussing...

Imaging a three-dimensional structure by confocal focussing...

Integrated alignment and calibration of optical system

Intensity compensation for interchangeable chromatic point...

Method and apparatus for imaging three-dimensional structure

Method and apparatus for imaging three-dimensional structure

Method and apparatus for imaging three-dimensional structure

Method and apparatus for imaging three-dimensional structure

Method and apparatus for measuring heights of test parts of...

Method and apparatus for optical measurement of a surface...

Method and arrangement for determining the geometry of...

Method and arrangement for measuring the structures of an...

Method and device for optically examining an object

Method for measuring step difference in a semiconductor...