Optics: measuring and testing – Shape or surface configuration – By focus detection
Reexamination Certificate
2011-05-17
2011-05-17
Punnoose, Roy (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
By focus detection
Reexamination Certificate
active
07944569
ABSTRACT:
An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.
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Babayoff Noam
Glaser-Inbari Isaia
Cadent Ltd.
Hopkins Susanne M.
Klima William L.
Punnoose Roy
The Nath Law Group
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