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Imaging a three-dimensional structure by confocal focussing...

Optics: measuring and testing – Shape or surface configuration – By focus detection
Reexamination Certificate

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Imaging a three-dimensional structure by confocal focussing...

Optics: measuring and testing – Shape or surface configuration – By focus detection
Reexamination Certificate

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Integrated alignment and calibration of optical system

Optics: measuring and testing – Shape or surface configuration – By focus detection
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Intensity compensation for interchangeable chromatic point...

Optics: measuring and testing – Shape or surface configuration – By focus detection
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