Method and device for optically examining an object

Details Method and device for optically examining an object Method and device for optically examining an object

2002-09-10

2009-02-24

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

By focus detection

C250S201300, C250S201700

Reexamination Certificate

active

07495778

ABSTRACT:
A device for optically examining an object includes a lens, an object stage for receiving the object, and an image-recording apparatus for recording a series of individual images of the object in a number of planes. A piezo-controlled apparatus is provided for adjusting the distance between the lens and the object, and an image-generating apparatus is provided for generating a multifocus image from the series of individual images.

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