Method and apparatus for imaging three-dimensional structure

Details Method and apparatus for imaging three-dimensional structure Method and apparatus for imaging three-dimensional structure

2011-08-02

2011-08-02

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

By focus detection

Reexamination Certificate

active

07990548

ABSTRACT:
An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

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