Auto focus system for reticle inspection

Details Auto focus system for reticle inspection Auto focus system for reticle inspection

2008-03-04

2010-11-16

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

By focus detection

Reexamination Certificate

active

07835015

ABSTRACT:
Methods and apparatus relating to the inspection of photomasks are described. In an embodiment, an inspection tool may be automatically focused on a reticle utilizing various topographic mapping techniques. Other embodiments are also described.

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