Device for measuring distance and method for operating said...
Device for measuring distance and method for operating said...
Displacement pickup
Door/gate monitoring sensor device
Eccentricity measuring instrument of polygon-mirror motor
Encoder measurement based on layer thickness
Encoder with an alignment target
Enhanced laser projector calibration wall
Focus measurement in projection exposure apparatus
High accuracy angular resolution and measurement
Hybrid sensor
Illumination device, and coordinate measuring instrument...
Illumination device; and coordinate measuring instrument...
Image-forming device
Inspection device of a tape reel
Laser target assembly for sheaves and height gages
Light beam switch system for locating the edge of a workpiece
Lithographic apparatus and method for calibrating the same
Making method of sample for evaluation of laser irradiation...
Marker used for measuring displacement of moving object and...