Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate
2007-04-24
2007-04-24
Lavarias, Arnel (Department: 2872)
Optics: measuring and testing
Position or displacement
Position transverse to viewing axis
C356S400000, C356S401000, C362S554000
Reexamination Certificate
active
10776256
ABSTRACT:
A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.
REFERENCES:
patent: 4505555 (1985-03-01), Piller et al.
patent: 4721359 (1988-01-01), Nishioka et al.
patent: 4964692 (1990-10-01), Prescott
patent: 5608575 (1997-03-01), Suzuki
patent: 5907395 (1999-05-01), Schulz et al.
patent: 6064477 (2000-05-01), Matsumoto et al.
patent: 6285855 (2001-09-01), Tsuji
patent: 6456377 (2002-09-01), Suzuki et al.
patent: 2003/0002296 (2003-01-01), Steiner et al.
patent: 1913711 (1969-10-01), None
patent: 3624687 (1987-05-01), None
patent: 0905439 (1999-03-01), None
patent: 04196280 (1992-07-01), None
patent: 06029189 (1994-02-01), None
patent: WO 97/03346 (1997-01-01), None
patent: WO 98/07001 (1998-02-01), None
patent: WO 99/53269 (1999-10-01), None
patent: WO-9963384 (1999-12-01), None
F. L. Pedrotti, L. S. Pedrotti, ‘Introduction to Optics’, Prentice Hall, New Jersey, 1993, pp. 135-139.
European Search Report dated Jan. 12, 2004.
International Search Report dated Mar. 3, 2004.
Cemic Franz
Danner Lambert
Hoppen Gerhard
Crowell & Moring LLP
Lavarias Arnel
Leica Microsystems Semiconductor GmbH
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