4. Optics: measuring and testing
  5. Position or displacement
  6. Position transverse to viewing axis
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Laser target assembly for sheaves and height gages

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Light beam switch system for locating the edge of a workpiece

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Lithographic apparatus and method for calibrating the same

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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