Making method of sample for evaluation of laser irradiation...

Details Making method of sample for evaluation of laser irradiation... Making method of sample for evaluation of laser irradiation...

2009-01-28

2011-10-25

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Position or displacement

Position transverse to viewing axis

C356S603000, C356S400000, C356S622000, C702S081000, C702S083000

Reexamination Certificate

active

08045184

ABSTRACT:
A method for making a sample for evaluation of laser irradiation position and evaluating the sample, and an apparatus which is switchable between a first mode of modification of semiconductor and a second mode of making and evaluating the sample. Specifically, a sample is made by irradiating a semiconductor substrate for evaluation with a pulse laser beam while the semiconductor substrate is moved for evaluation at an evaluation speed higher than a modifying treatment speed, each relative positional information between pulse-irradiated regions in the sample is extracted, and stability of the each relative positional information between pulse-irradiated regions is evaluated. The evaluation speed is such a speed that separates the pulse-irradiated regions on the sample from each other in a moving direction.

REFERENCES:
patent: 4689491 (1987-08-01), Lindow et al.
patent: 5091963 (1992-02-01), Litt et al.
patent: 6433872 (2002-08-01), Nishi et al.
patent: 6647148 (2003-11-01), Ozawa et al.
patent: 6836532 (2004-12-01), Durst et al.
patent: 6861614 (2005-03-01), Tanabe et al.
patent: 6933185 (2005-08-01), Wada et al.
patent: 6975386 (2005-12-01), Tsumura et al.
patent: 7050878 (2006-05-01), Yamazaki et al.
patent: 7425703 (2008-09-01), Nakasuji et al.
patent: 2003/0142298 (2003-07-01), Ujihara et al.
patent: 2004/0254769 (2004-12-01), Miyairi et al.
patent: 2000-31229 (2000-01-01), None
patent: 2000-114174 (2000-04-01), None
patent: 2001-196430 (2001-07-01), None
patent: 2002-158186 (2002-05-01), None

Affiliated with

Also associated with

Rating

Making method of sample for evaluation of laser irradiation... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Making method of sample for evaluation of laser irradiation..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Making method of sample for evaluation of laser irradiation... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4266119