4. Optics: measuring and testing
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Wafer and stage alignment using photonic devices

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Wafer stage position calibration method and system

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Wireless substrate-like sensor

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Wireless substrate-like sensor

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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Wireless substrate-like sensor

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate

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