Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
Reexamination Certificate
2005-12-13
2005-12-13
Nguyen, Thong (Department: 2872)
Optics: measuring and testing
Position or displacement
Position transverse to viewing axis
C356S400000, C356S401000
Reexamination Certificate
active
06975409
ABSTRACT:
An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage (26) for receiving a substrate with a feature (31) that is to be measured, an illumination system with a light source (1), an optical fiber bundle (4), a coupling-in optical system (3), a coupling-out optical system (5), an illuminating optical system (17; 20) for illuminating an image field on the substrate, and a detector device (14) for determining the position of the feature. A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field.
REFERENCES:
patent: 4505555 (1985-03-01), Piller et al.
patent: 4721359 (1988-01-01), Nishioka et al.
patent: 4964692 (1990-10-01), Prescott
patent: 5608575 (1997-03-01), Suzuki
patent: 5907395 (1999-05-01), Schulz et al.
patent: 6285855 (2001-09-01), Tsuji
patent: 6456377 (2002-09-01), Suzuki et al.
patent: 2001/0033490 (2001-10-01), Koyama et al.
patent: 1913711 (1969-10-01), None
patent: 3624687 (1987-05-01), None
patent: 0905439 (1999-03-01), None
patent: 04196280 (1992-07-01), None
patent: WO 97/03346 (1997-01-01), None
patent: WO 98/07001 (1998-02-01), None
patent: WO 99/53269 (1999-10-01), None
patent: WO-9963384 (1999-12-01), None
Cemic Franz
Danner Lambert
Hoppen Gerhard
Crowell & Moring LLP
Lavarias Arnel C.
Leica Microsystems Semiconductor GmbH
Nguyen Thong
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