4. Optics: measuring and testing
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Methods, assemblies and systems for inspecting a photomask

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Metrology tool, system comprising a lithographic apparatus...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Microvia inspection system

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Monitoring of concentration of nitrogen in nitrided gate...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Mounting apparatus, inspecting apparatus, inspecting method,...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multi mode inspection method and apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multi-beam apparatus for measuring surface quality

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multi-resolution inspection system and method of operating same

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multi-spot illumination and collection optics for highly...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multilayer, cushioned liquid drop detector

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Patent

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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam inspection apparatus and method

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam scanner for an inspection system

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple beam scanner for an inspection system

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Near field optical certifying head for disc asperity mapping

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Non-destructive testing and imaging

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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